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特許 

Proximity effect correction method for charged particle beam exposure

US Patent Issued on August 26, 2003

論文

Stochastic Coulomb interaction effect in ion-neutralized electron-beam projection optics

Proximity effect correction using pattern shape modification and area density map

http://link.aip.org/link/?JVTBD9/21/2663/1

http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTBD9000019000006002572000001&idtype=cvips&gifs=yes 

http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTBD9000018000006003150000001&idtype=cvips&gifs=yes