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特許
Proximity effect correction method for charged particle beam exposure
論文
Stochastic Coulomb interaction effect in ion-neutralized electron-beam projection optics
Proximity effect correction using pattern shape modification and area density map
http://link.aip.org/link/?JVTBD9/21/2663/1
http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTBD9000019000006002572000001&idtype=cvips&gifs=yes
http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JVTBD9000018000006003150000001&idtype=cvips&gifs=yes
